The EUV N&K and Phase Measurement Tool is designed for the direct actinic measurement of the optical properties of Extreme Ultraviolet (EUV) single-layer coatings and multilayer stacks.

• The n&k measurement is based on the robust technique of wide-angle spectroscopic reflectance

• Performs bulk phase measurements of mask absorber areas

• Equipped with EUV Tech’s proven Laser-Produced Plasma (LPP) EUV lightsource

• Selectable spectrum range and incident angle

• Features an ultra-clean transfer system