Lithometrix Software Suite

The Lithometrix SuMMIT Software Suite is a rigorous, reproducible, powerful, and user-friendly off-line analysis package for line-edge roughness/line-width roughness (LER/LWR) processing and critical dimension (CD) analysis of SEM, as well as other images. This feature-rich analysis program integrates a variety of visualization tools and numerous built-in processing algorithms. 

Going beyond the conventional characterization of LER as a single 3-sigma deviation number, SuMMIT provides a wealth of integrated spectral analysis and visualization techniques. It is also capable of performing large unattended batch tasks, allowing large volumes of data to be analyzed quickly.  

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    Features

    To learn more about the SuMMIT solution, check out the robust SuMMIT software feature set.

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    Add-On Toolboxes

    Looking to enhance the capabilities of the SuMMIT software? Check out our optional add-on toolboxes.

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  • Resources Icon for Summit

    Resources

    Check out the latest software updates and application notes, as well as our FAQs.

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Version 12.7.2

  • FEM batch now also saves LWR data

  • Process window tool updated to handle new linear FEM batch output file format containing both LER and LWR

  • Fixed bug that could mistakenly report LER/LWR as negative number

  • Speeds up contact analysis

  • Batch file now saves Fractal PSD fit parameters

  • Additional image processing on file load functionality added

NOTE*: If installing SuMMIT on a Windows 7 or Windows 10 operating system, please refer to our FAQs.

NOTE**: MATLAB Runtime Installer is required to run SuMMIT, select the following link to download the MATLAB RTE installer.