Lighting the way to a brighter future.
A global leader in the production of at-wavelength extreme ultraviolet (EUV) metrology tools, EUV Tech supplies the semiconductor manufacturing industry with leading-edge metrology solutions using extreme ultraviolet light and soft-x-ray technology.
Lithometrix Software
The Lithometrix SuMMIT Software Suite is a rigorous, reproducible, powerful, and user-friendly off-line analysis package for line-edge roughness/line-width roughness (LER/LWR) processing and critical dimension (CD) analysis of SEM, as well as other images.
As a major developer of EUV metrology solutions and market leader in creating at-wavelength EUV tools, EUV Tech possesses the knowledge base, experience and expertise to provide in-house measurement services for those products.