Features

Summit visualization icon

Visualization

  • Load wide variety of image data

    • tiff, bmp, jpg, gif, png, ras, ppm, hdf, pcx, xwd, pgm

    • Prolith AIM files

    • DI AFM files

    • Zygo Interferometer files

    • Load any image data directly from clipboard

    • New file types available upon request

  • Built-in image processing

    • Image rotation

    • Negative image

    • Image cropping

    • Image filtering

    • Image detrending

    • Processed image export

  • View zoom capabilities

  • Integrated visualization

    • Lineout plots of SEM image

    • Interactive threshold-setting plot of resist lines

    • CD as a function of length along line

    • Line-edge position as a function of length along line for easy outlier detection

    • Spectral visualization

    • Processed line-image visualization

    • Line-edge overlay on SEM image and processed line image

  • Export "cleaned-up" processed image as tiff or Prolith mask file

Measurement and Analysis icon for Summit

  • Pattern Rec for device-level LER or CD measurements

  • Contact-analysis capabilities

  • Corner-rounding measurement capabilities

  • Process-window analysis capabilities

  • Surface analysis tool, detrending, 2D PSD, isotropic PSD, integrated roughness, flare, etc.

  • Compound data analysis

    • Automatically combine multiple images into single analysis dataset

    • Built-in data visualization capabilities for easy report generation on large data sets

Measurement & Analysis

  • Integrated spectral analysis

  • High-pass, low-pass, band-pass and notch filtering of LER spectrum

  • Automatic PSD noise-floor estimation

  • Advanced LER Metrics

    • Height-height correlation function

    • Sigma versus length function

    • PSD slope calculation

    • Correlation length calculation

    • Roughness exponent calculation

    • Automatic PSD noise-floor estimation

    • System noise estimation tool

  • Integrated interactive fence metrology

  • Integrated interactive line-out metrology

Operation icon for Summit

  • Results storage, retrieval, and export

  • Save and reload calculation results to/from Matlab ".mat" files

  • Export results to Excel-compatible .csv files

  • Export results to Matlab command window (requires Developer’s Kit)

  • All plots can be exported as raw data or graphics and sent to clipboard for easy report generation

  • Recipe-creating storage and retrieval capabilities

  • Automatic calibration from most LEO and Hitachi SEM files (new formats available upon request)

  • Synthesize SEM images of lines with LER and export image as tiff or Prolith mask file

    • Stochastic Resist modeling capabilities to synthesize resist images from aerial-image data based on given resist parameters

  • Batch mode operation

  • Export batch data to CSV

  • Integrated batch data plot tool for easy visualization of large data sets

  • Threshold batch tool for automated through threshold analysis

  • Automation to simultaneously measure both lines and spaces with built in reporting

  • Region of interest (ROI) processing

    • Line-based ROIs

    • Rectangle-based ROIs

    • Multiple simultaneous ROI processing

    • Automated ROI array generation capabilities

    • Extensive ROI interactive editing capabilities

  • Integrated line-image prefiltering options

Operation

Customization icon for Summit

  • Numerous built-in processing algorithms

    • User-selectable threshold

    • User-selectable threshold detection algorithm

    • User-selectable line-edge interpolation algorithm

    • User-selectable outlier handling

    • Line-edge-data post-processing options

  • Scripting language support

  • User-defined algorithm presets for convenient recall of settings

  • User-defined processing function capabilities (requires Developer’s Kit)

  • Various manual calibration methods

  • User-configurable preferences

  • Automatic, semi-automatic and manual fence positioning

Customization

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The MathWorks Inc.