SuMMIT Process Window Analysis Toolbox
The Process Window Analysis Toolbox adds process-window computation capabilities to SuMMIT. This provides a convenient, high-performance alternative to high-priced lithographic data-analysis packages.
This toolbox also easily integrates with SuMMIT batch analysis through the use of SuMMIT process-window batch files. Process-window batch input files can be easily generated simply by adding corresponding dose and focus information to each line of the batch file. When such a batch is run, additional process-window output files are created during batch execution that can be directly loaded into the process-window analysis toolbox.
Using the Process Window Analysis toolbox can help you quickly turn your batch-output data into meaningful process windows. The toolbox provides the use of common visualization plots, such as Bossung, process map and exposure latitude versus depth of focus. Process windows can be determined based on CD or LER data, and tools are provided for interactive editing of the data points from the Bossung plot.
The SuMMIT Process Window Analysis Toolbox can also easily handle non-SuMMIT data since it uses simple text-based input files.