The Stochastic LER Modeling Toolbox adds LER modeling capabilities to SuMMIT. Load an aerial image into SuMMIT, define the resist parameters and SuMMIT will compute the deprotection image, including LER. Currently, SuMMIT's extensive LER analysis capabilities can be applied to the modeled deprotection image.

With this toolbox, any aerial image can be converted to a deprotection image with LER. The resist parameters of interest are defined by the user and SuMMIT computes the deprotection image, including effects of shot noise, deprotection blur, saturation effects, etc. Once the deprotection image is computed, all of SuMMIT's LER-analysis tools can be applied or the image can be exported.