SuMMIT Software Add-On Toolboxes
Interested in modeling mask effects? Looking for robust second-order statistics modeling?
To extend the usability of your SuMMIT software experience, we have several add-ons to enhance SuMMIT’s feature sets.
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Contact Analysis/2D Toolbox
SuMMIT Contact Analysis/2D Toolbox adds contact metrology capabilities to SuMMIT including auto-fencing for contacts and a variety of contact-specific metrics in addition to conventional LER metrics.
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Surface Analysis Toolbox
SuMMIT Surface Analysis Toolbox adds surface PSD and Flare analysis capabilities to SuMMIT. This makes SuMMIT relevant for system metrology, as well as resist metrology.
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Process Window Analysis Toolbox
SuMMIT Process Window Analysis Toolbox adds process-window computation capabilities to SuMMIT. This provides a convenient, high-performance alternative to high-priced lithographic data-analysis packages.
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Stochastic LER Modeling Toolbox
SuMMIT Stochastic LER Modeling Toolbox adds LER modeling capabilities to SuMMIT. Load an aerial image into SuMMIT, define the resist parameters and SuMMIT will compute the deprotection image, including LER.
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Developer's Kit
SuMMIT Developer's Kit adds a scripting language capability, as well as a Server mode to actively monitor a directory for an updated SuMMIT Script file that will execute the Script when it appears.