SuMMIT Software Add-On Toolboxes

Interested in modeling mask effects? Looking for robust second-order statistics modeling?

To extend the usability of your SuMMIT software experience, we have several add-ons to enhance SuMMIT’s feature sets.

  • Photo of Contact Analysis/2D Toolbox

    Contact Analysis/2D Toolbox

    SuMMIT Contact Analysis/2D Toolbox adds contact metrology capabilities to SuMMIT including auto-fencing for contacts and a variety of contact-specific metrics in addition to conventional LER metrics.

  • Image of Surface Analysis Toolbox

    Surface Analysis Toolbox

    SuMMIT Surface Analysis Toolbox adds surface PSD and Flare analysis capabilities to SuMMIT. This makes SuMMIT relevant for system metrology, as well as resist metrology.

  • Image of Process Window Analysis Toolbox

    Process Window Analysis Toolbox

    SuMMIT Process Window Analysis Toolbox adds process-window computation capabilities to SuMMIT. This provides a convenient, high-performance alternative to high-priced lithographic data-analysis packages.

  • Image of Stochastic LER Modeling Toolbox

    Stochastic LER Modeling Toolbox

    SuMMIT Stochastic LER Modeling Toolbox adds LER modeling capabilities to SuMMIT. Load an aerial image into SuMMIT, define the resist parameters and SuMMIT will compute the deprotection image, including LER.

  • Image of Developer's Kit interface

    Developer's Kit

    SuMMIT Developer's Kit adds a scripting language capability, as well as a Server mode to actively monitor a directory for an updated SuMMIT Script file that will execute the Script when it appears.